Automated Coating Three-Piece Set Equipment

Automated three-piece set for crystalline silicon tandem perovskite solar cell coating, specially designed for functional layer coating on 182mm*182mm silicon wafers.

This system includes: Coater (with solution supply system), environmental enclosure (clean dust removal, with organic solvent treatment device), silicon wafer handling robot mechanism, VCD flash extraction equipment, stack furnace annealing equipment, and electrical control unit, etc.

This system performs fully automatic wafer pickup from a cassette lift, then completes coating -> VCD vacuum solvent extraction -> stack furnace annealing, and finally unloads back into the cassette – all three processes are fully automated.